Selectively Grown Vertical Si p-MOS Transistor with Reduced Overlap Capacitances

Klaes, D.; Moers, J.; Tönnesmann, A.; Grimm, M.; Wickenhäuser, S.; Vescan, L.; Marso, Michel; Kordoš, P.; Lüth, H.

doi:10.1016/S0040-6090(98)01248-6

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Selectively Grown Vertical Si p-MOS Transistor with Reduced Overlap Capacitances

Klaes, D.; Moers, J.; Tönnesmann, A. et al.

1998 • In Proceedings of the 28th European Solid State Devices Research Conference, Bordeaux, France

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https://hdl.handle.net/10993/20676

DOI
10.1016/S0040-6090(98)01248-6

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Disciplines :

Electrical & electronics engineering

Identifiers :

UNILU:UL-CONFERENCE-2009-421

Author, co-author :

Klaes, D.; Institute of Thin Film and Ion Technology (ISI), Research Centre Jülich, D-52425 Jülich, Germany

Moers, J.; Institute of Thin Film and Ion Technology (ISI), Research Centre Jülich, D-52425 Jülich, Germany

Tönnesmann, A.; Institute of Thin Film and Ion Technology (ISI), Research Centre Jülich, D-52425 Jülich, Germany

Grimm, M.; Institute of Thin Film and Ion Technology (ISI), Research Centre Jülich, D-52425 Jülich, Germany

Wickenhäuser, S.; Institute of Thin Film and Ion Technology (ISI), Research Centre Jülich, D-52425 Jülich, Germany

Vescan, L.; Institute of Thin Film and Ion Technology (ISI), Research Centre Jülich, D-52425 Jülich, Germany

Marso, Michel ; Institute of Thin Film and Ion Technology (ISI), Research Centre Jülich, D-52425 Jülich, Germany

Kordoš, P.; Institute of Thin Film and Ion Technology (ISI), Research Centre Jülich, D-52425 Jülich, Germany

Lüth, H.; Institute of Thin Film and Ion Technology (ISI), Research Centre Jülich, D-52425 Jülich, Germany

External co-authors :

yes

Language :

English

Title :

Selectively Grown Vertical Si p-MOS Transistor with Reduced Overlap Capacitances

Publication date :

1998

Event name :

28th European Solid State Devices Research Conference, Bordeaux, France

Event date :

1998

Main work title :

Proceedings of the 28th European Solid State Devices Research Conference, Bordeaux, France

Pages :

568-571

Available on ORBilu :

since 30 March 2015

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