Article (Scientific journals)
Wedge-shaped layers from porous silicon: the basics of laterally graded interference filters
Bohn, H. G.; Marso, Michel
2005In Physica Status Solidi A. Applied Research, 202 (8), p. 1437-1442
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Abstract :
[en] The process of making laterally graded interference filters has been reanalyzed. A simple and consistent picture arises if one applies a constant electric field perpendicular to the etch current instead of a constant current. The system is quantitatively modeled by means of a pure ohmic equivalent circuit model.
Disciplines :
Electrical & electronics engineering
Identifiers :
UNILU:UL-ARTICLE-2009-388
Author, co-author :
Bohn, H. G.;  Institut für Schichten und Grenzflächen, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany
Marso, Michel ;  Institut für Schichten und Grenzflächen, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany
Language :
English
Title :
Wedge-shaped layers from porous silicon: the basics of laterally graded interference filters
Publication date :
2005
Journal title :
Physica Status Solidi A. Applied Research
ISSN :
1521-396X
Publisher :
Wiley-VCH, Berlin, ALLEMAGNE
Volume :
202
Issue :
8
Pages :
1437-1442
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBilu :
since 18 March 2015

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